中文摘要：

设计了一种采用锆钛酸铅（PZT）／K,电薄膜悬臂梁作为驱动机理的500μm×500μm微镜结构。该微镜主要由4个悬臂梁与1个反射镜组成，4个悬臂梁起支撑微镜的作用，即微镜主要利用微悬臂梁自由端头的小挠度来实现垂直方向的位移。提出了与互补金属氧化物半导体（CMOS）工艺相兼容的制作方法，利用有限元软件ANSYS7．0对压电微镜的反射镜平整度、结构机械强度、线性度、响应速度和功耗等性能进行了研究，并与数值计算结果进行了比较，结果表明此微镜达到了快速、高精度、低功耗的设计要求。

英文摘要：

A 500μm× 500 μm micro-mirror structure actuated by PZT piezoelectric cantilever beam was designed. The micro-mirror consists of four cantilever beams and a speculum, and the four cantilever beams supported the speculum. The deflection of cantilever beam free end engendered uprightness displacement of micro-mirror. A new fabrication process of the micro-mirror compatible with COMS was presented. The smooth degree of reflection mirror, mechanical strength, linearity, response speed and power consume of micro-mirror were simulated by using finite element method software ANSYS7.0. The simulating results were compared with theory computing results, which shows that the micro-mirror achieves the design goals of celerity, high precision and low power consumption.