中文摘要：

本文以钛酸丁酯[Ti（OC4H9）4]、盐酸和去离子水为原料，采用溶胶-凝胶法和旋转涂膜工艺，在玻璃基片上制备透明的TiO2纳米薄膜。通过XRD测试表明：经500℃退火得到的薄膜上TiO2为锐钛矿晶相而粉末为锐钛矿、金红石和板钛矿的混合晶相。通过对膜进行紫外可见光谱分析，探讨了影响TiO2纳米膜厚度和禁带宽度的各种因素。实验结果表明：溶胶的陈化时间、膜的热处理温度、涂膜层数等都将直接影响二氧化钛薄膜的紫外可见光谱和禁带宽。

英文摘要：

Using [Ti（OC4H9）4], HCL and H2O as raw materials, TiO2 transparent thin films were prepared on glass substrate by sol-gel method. The Structure of TiO2 films and powders were investigated by X-ray diffraction after heating treatment in 500℃. The results show that TiO2 fine particle appeared anatase structure in TiO2 thin films, and formed the composite phase structure of anatase, rutile and Brookit of TiO2 powders. The thickness and the bandgap of TiO2 nano films were calculated by using the UV-VIS spectra of the films. The results show that aging time, heat treatment and dip coating times would affect the UV-VIS spectra, thickness, and the bandgap of TiO2 thin films.