中文摘要：

采用溶胶－凝胶法和旋转涂膜工艺，以普通玻璃为衬底，制备均匀、透明的Ti02纳米薄膜。利用X射线衍射仪（XRD）、原子力显微镜（AFM）和紫外－可见光谱（UV／vis）对TiO2进行表征。通过500℃、600℃、700℃、800℃和900℃恒温烧结2h后XRD测试表明：经500℃退火得到TiO2粉末为锐钛矿晶相，800℃转化为金红石相结构，900℃出现了金红石相与板钛矿相的混合晶相。通过AFM观测，薄膜的平均粗糙度为1．71mm。通过紫外可见光谱分析，探讨了影响TiO2纳米膜厚度和禁带宽度度的各种因素。结果表明：涂膜次数、热处理温度等将直接影响二氧化钛薄膜的紫外可见光谱和禁带宽度。

英文摘要：

The uniform transparent nanocrystalline TiO2 thin films were prepared on glass substrate by sol-gel method. The nanostructure TiO2 were characterized by XRD,AFM and UV-VIS spectra. The Structure of TiO2 powders was investigated by X-ray diffraction after heating treatment in 500℃.600℃,700℃.800℃ and 900℃. The results show that the crystalline phase is anatase in 500℃ ,rutile in 800℃ and the composite phase structure of rutile and Brookit in 900℃ . the films roughness average is 1.71 nm by AFM. The thickness and the bandgap of nanocrystalline TiO2 thin films were calculated by using the UV-Vis spectra. The results show that aging time,heat treatment and dip coating times would affect the UV-Vis spectra and the bandgap of TiO2 thin films.