欢迎您！东篱公司
退出
-
申报数据库
-
立项数据库
-
成果数据库
-
项目获奖数据库
中文摘要：
设计并利用控制孔技术加工了GaAs基微结构和基于该微结构的共振隧穿薄膜，并通过实验研究了微结构中共振隧穿薄膜的介观压阻效应，试验结果表明其介观压阻灵敏度比硅的最大压阻灵敏度高一个数量级。
英文摘要：
The GaAs micro-structure and the resonant tunneling film based on the micro-structure were designed and processed by control hole technology. And the meso-piezoresistive effects of the film were studied through experiments, more than one order higher piezoresistive sensitivity than that of silicon is demonstrated.
同期刊论文项目
同项目期刊论文
期刊信息
位置：