欢迎您！东篱公司
退出
-
申报数据库
-
立项数据库
-
成果数据库
-
项目获奖数据库
中文摘要：
针对目前矢量水声传感器存在的高灵敏度、低频检测以及小型化等问题，提出了一种新型的硅微MEMS矢量水声传感器。利用敏感材料的压阻效应、传感器精巧的微结构以及硅微MEMS技术，实现矢量水声传感器的低频特性和小型化的可行性。以声场中的刚硬圆柱在声波作用下的声散射问题作为切入点，对传感器的同振原理进行分析，并基于该机理以及传感器的特殊结构，提出采用注入蓖麻油的方法实现微结构的柱体与所处介质质点同振。分别采用振动台标定和驻波场测量的方法完成了传感器的灵敏度、频响以及指向性的测试，最后对2种测试结果进行了分析和比较。研究结果表明：所研制的水声传感器具有较低的工作频率，其水下自由场声压灵敏度值为-207．6dB（0 dB=1V／μPa，测试频率为200Hz），指向性网的零点深度为50．9dB。
英文摘要：
We propose a micro electro mechanical systems （MEMS） vector hydrophone based on silicon to solve problems facing vector hydrophones, such as high sensitivity, low-frequency detection, minimization, etc. The feasibility of implementing its low frequency feature and minimization was studied using the piezoresistive effect, MEMS technology, and an ingenious structure for the hydrophone. Firstly, we analyzed scattering theory for a rigid column, and then the working principles of resonant-column type vector hydrophones. On that basis, we injected castor oil into a hat made of polyurethane rubber in order to improve resonance of the rigid column with particles of the acoustic medium. Secondly, the properties of this and standard vector hydrophones, such as sensitivity, frequency response and directivity, were measured with the vibration-platform calibration and standing wave field measurement methods, respectively. Final- ly, the results were analyzed and compared. The experimental results showed that the proposed vector hydrophone has good low-frequency performance, its free-field sound sensitivity is -207.6dB （ 0 dB= 1 V/μPa, testing frequency 200 Hz）, and the zero depth of the directivity pattern is 50. 9 dB.
同期刊论文项目
同项目期刊论文
期刊信息
位置：