中文摘要：

采用循环伏安法制备CoNiFe、CoNiFeB和CoNiFeP软磁薄膜。采用SEM、EDS和XRD进行薄膜形貌、成分及相组成分析,应用振动样品磁强计（VSM）测量其软磁性能,并采用电化学阻抗谱（EIS）及极化曲线研究其腐蚀阻力。结果表明,电沉积CoNiFe、CoNiFeB和CoNiFeP软磁薄膜为晶态和非晶态混合体,含硼、磷添加剂可促进非晶相的形成;CoNiFe和CoNiFeB具有纳米结构;含硼添加剂可提高薄膜的致密度和阻力,并使矫顽力从851.48A/m降低至604.79A/m,而磁饱和强度基本不变。含磷添加剂可增加薄膜粒子的尺寸并降低其耐蚀性,并使CoNiFeP薄膜的矫顽力增加至12485.79A/m,磁饱和强度大幅度降低至1.25T。

英文摘要：

CoNiFe,CoNiFeB and CoNiFeP soft magnetic thin films were prepared by cyclic voltammetry method.The morphologies,composition and structures were characterized by scanning electron microscope（SEM）,energy-dispersive X-ray spectroscope（EDS） and X-ray diffractometer（XRD）.The soft magnetic properties were investigated through vibrating sample magnetometer（VSM）.The corrosion resistance was investigated through Tafel polarization and electrochemical impedance spectroscopic（EIS）.The results show that all the electrodeposited CoNiFe,CoNiFeB and CoNiFeP films are mixtures of crystalline and amorphous phases,and high amount of boron/phosphorus-containing additives favors the formation of amorphous state.Nanostructure is obtained in CoNiFe and CoNiFeB films.The inclusion of boron causes the film more dense and also increases its corrosion resistance.Meanwhile,the inclusion of boron lowers its coercivity（Hc） from 851.48 A/m to 604.79 A/m,but the saturation magnetic flux density（Bs） is almost unchanged.However,the addition of phosphorus greatly increases the film particle size and decreases its corrosion stability.The coercivity（Hc） of CoNiFeP film is also highly increased to 12485.79 A/m,and its saturation magnetic flux density（Bs） is greatly decreased to 1.25 T.