位置：成果数据库 > 会议 > 会议详情页
Precise width control of single crystalline silicon nano-wall structure based on wet etching process
  • 所属机构名称：中国科学院上海微系统与信息技术研究所
  • 会议名称：7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
  • 时间：2012
  • 成果类型：会议
  • 相关项目：微纳系统材料、制造与器件物理
作者： Yu, Xiao|Jin, Qinhua|Li, Tie|Wang, Yuelin|
同会议论文项目
微纳系统材料、制造与器件物理
期刊论文 80 会议论文 27 专利 30
同项目会议论文
Resonant micro-cantilever chemical sensor with one-step synthesis of -COOH functionalized mesoporous
Different responses between undoped and N-doped few-layer graphene based photonic devices
A high-q bulk-resonator equipped with ultra-sensitive mesoporous nano-material for detection of trac
Permeable-membrane separating detection of vaporized liquid with nanoparticle-functionalized resonan
Tensile strained Ge thin films grown on InGaP/GaAs metamorphic templates,
Magnetoresistance behaviors of undeped and N-doped graphene grown by CVD method
Label-free DNA detection based on silicon nanowires
CMOS-compatible silicon nanowire based field-effect pH sensor
InAs quantum dot lasers grown by gas source molecular beam epitaxy on Ge substrates
Optimization design and fabrication of a novel optical-readout uncooled thermal imaging chip
A Low Power Catalytic Combustion Gas Sensor Based on a Suspended Membrane Microhotplate,
Study of droplets motion on a chip driven by thermal gradient
Photovoltaic and photoconductive effects in different individual single-walled carbon-nanotube-based
Thin-film-based thermoelectric energy generator device with a card structure
Photovoltaic response of N-doped graphene-based photodetector
A high heating efficiency two-beam microhotplate for catalytic gas sensors
Micromachining of Single Crystalline Silicon Nanowires on (111) Silicon Wafers
Design and Fabrication of a Novel 3D Micropellistor
INTEGRATION OF MICROFLUIDIC SAMPLE DELIVERY SYSTEM ON SILICON NANOWIRE-BASED BIOSENSOR
LABEL-FREE ELECTRICAL DETECTION OF DNA WITH CMOS-COMPATIBLE SILICON NANOWIRE BIOSENSOR ARRAYS,
The Few-layer Graphene’s Electrical Response to CH4 on Microheater,
Nano fabrication for nano effect and nano sensor,
InAs/InP量子点激光器的研究
Functionalized gold-nanoparticles directly grown on graphene-oxide sheets to form porous-stacked sen
Resonant cantilevers with nanoparticles-spaced functional graphene-oxide sheets for high-performance
Optimization on the synthesis of large-area single-crystal graphene domains by chemical vapor deposi