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Micromachining of Single Crystalline Silicon Nanowires on (111) Silicon Wafers
  • 所属机构名称：中国科学院上海微系统与信息技术研究所
  • 会议名称：3M-NANO
  • 时间：2011.8.8
  • 成果类型：会议
  • 相关项目：微纳系统材料、制造与器件物理
作者： Qinhua Jin|Tie Li|Yuelin Wang|
同会议论文项目
微纳系统材料、制造与器件物理
期刊论文 80 会议论文 27 专利 30
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