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A high heating efficiency two-beam microhotplate for catalytic gas sensors
  • 所属机构名称：中国科学院上海微系统与信息技术研究所
  • 会议名称：7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
  • 时间：2012
  • 成果类型：会议
  • 相关项目：微纳系统材料、制造与器件物理
作者： Xu, Lei|Li, Tie|Gao, Xiuli|Wang, Yuelin|
同会议论文项目
微纳系统材料、制造与器件物理
期刊论文 80 会议论文 27 专利 30
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