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A Low Power Catalytic Combustion Gas Sensor Based on a Suspended Membrane Microhotplate,
  • 所属机构名称：中国科学院上海微系统与信息技术研究所
  • 会议名称：IEEE NEMS 2011
  • 时间：2011.2.2
  • 成果类型：会议
  • 相关项目：微纳系统材料、制造与器件物理
作者： [86] Lei Xu, Tie Li, Rui Zheng, Lei Xie, Lichung|Yuelin Wang|
同会议论文项目
微纳系统材料、制造与器件物理
期刊论文 80 会议论文 27 专利 30
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