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Analysis of Si3N4 Passivation effect by Self-Consistent Electro-Thermal-Mechanical Simulation in AlG
  • 所属机构名称：南京邮电大学
  • 会议名称：IEEE ICEMI
  • 时间：2011
  • 成果类型：会议
  • 相关项目：SOI功率器件横向变厚度耐压新技术的机理、工艺和模型研究
作者： Raunak Kumar, Abijith Prakash,|Briliant.Adhi.Prabowo|Anumeha, Jung-Ruey Tsai|Gene Sheu, Shao-Ming Yang|Yufeng Guo|
同会议论文项目
SOI功率器件横向变厚度耐压新技术的机理、工艺和模型研究
期刊论文 49 会议论文 25 专利 18
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