中文摘要：

为了缩短微机械谐振器的测量时间,提高测量效率。提出了一种针对压阻检测的微谐振器的频率特性测试新方法,该方法利用欧姆鉴相器,积分器和微处理器实现对微弱信号的有效检测。欧姆鉴相器以检测电阻为鉴相器,利用欧姆定律实现参考信号和被测信号的乘法鉴相运算;通过积分器实现对鉴相结果的积分运算,抑制干扰和噪声;微处理器用于对积分数据的采样并处理。实验结果表明：微谐振器快速测试方法样机的等效输入噪声指标约为槡2.7 nV/Hz,单频率点的测量时间为4 ms,与商用锁相放大器（LIA）相比,测量效率大大提高了。

英文摘要：

To reduce measurement time of micro-machined resonator and improve measurement efficiency, a novel frequency character measurement method for micro-machined resonator based on piezoresistive detection is put forward. An Ohm phase sensitive detector （Ohm-PSD）, an integrator and MCU are used to achieve the effective detection of weak signal. The phase detecting function of the ＇ Ohm-PSD＇ is achieved by the detective resistance with multiplying the reference signal and measured signal using Ohm＇s law. The integration of the multiplication results is carried out to restrain the interference and noise;MCU is used to process the sampling data in integration. Experimental results show that the equivalent input noise of rapid measurement method prototype is 2.7 nV√Hz, and measurement time at evel7 frequency point is 4 ms. Comparing it with the commercial Lock-in amplifier（LIA） , measurement efficiency increases greatly.