中文摘要：

为了实现谐振式硅微传感器测试仪器的直接校验,以及进行谐振式传感器反馈控制电路的优化研究,设计了能够模拟压阻拾振式谐振敏感元件特性的电路。其中压阻变换是该电路实现的关键。文章采用模拟电路实现对谐振敏感元件的电阻拾振特性的模拟,得到受电压线性控制的交变电阻。对该电路进行了高频特性分析,提出一种可拓宽其频带的反馈补偿技术,从而改善电路的高频性能。实验结果表明,该模拟电路能够现实压阻变换功能,满足谐振敏感元件特性的要求。

英文摘要：

To implement the direct checked of the resonant silicon microstructure sensor integrated testing instrument,and optimize the reactive controlling circuit of resonant sensor,a circuit with resonator Characteristics was designed,the resontor is detected piezoresistively.The Characteristics of piezoresistively,which is the crux of the circuit,was achieved by analog circuit.Linear voltage_controlled resistor was obtained.A feedback compensation technology that can be used to expand the frequency bandwidth of this analog circuit was presented,so the frequency response was improved.Experiment results demonstrate that the equivalent output impedance/resistor is controlled by the input voltage,which means the successful simulation of the resonator.