中文摘要：

Pull—in参数是设计磁微执行器时需要考虑的一项重要参数。研究漏磁效应对Pull—in参数的影响时，通常采用有限元法求数值解，需要反复重新建模，工作量大，因而需要一个解析模型。对于平行平板式磁微执行器，给出了详细的漏磁阻模型。将漏磁阻的解析式带入到Pull-in方程组中便可得到一对考虑了漏磁影响的Pull—in参数。利用有限元法对器件的Pull—in特性进行了仿真。将考虑漏磁影响的理论值和不考虑漏磁影响的理论值分别与有限元分析结果做对比，结果表明，不考虑漏磁影响时，Pull-in参数的误差随着极板间距的增大而增大。利用漏磁阻模型求出的Pull—in参数具则有良好的精度，并且相对误差不随极板间距的增大而增大。

英文摘要：

The pull-in parameters were crucial to magnetic microactuators. In the past, the Pull-in parameters of parallel magnetic microactuator were obtained by using finite element method （ FEM ） when the flux leakage effect can not be ignored. However, it was complicated and time-consuming, since the model must be rebuilt. An analytical method was expected to simplify the design. A leakage reluctance model is derived. Using this leakage reluctance, the magnetic Pull-in parameters were obtained by solving Pull-in equations. The Pull-in phenomenon of magnetic microactuator was simulated by FEM analysis. The analytical results considering the flux leakage effect and ignoring flux leakage effect are respectively to be compared with FEM results. The simulation results show that the analytical results considering the flux leakage effect coincide with FEM results well for a wide range of gap spacing. But, with the increase of initial gap spacing, the tolerance becomes lager when flux leakage effect is ignored.