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Laminated Photoresist Sacrificial Layer Process for 3-D Movable Suspension Microstructures
  • ISSN号：1022-6680
  • 期刊名称：Advanced Materials Research
  • 时间：0
  • 页码：284-288
  • 语言：英文
  • 相关项目：永磁锁定的双稳态电热微驱动器预微继电器研究
作者： Guifu Ding|Congchun Zhang|Hong Wang|Yibo Wu|
同期刊论文项目
永磁锁定的双稳态电热微驱动器预微继电器研究
期刊论文 14 会议论文 6 专利 6
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