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Fabrication of a MEMS inertia switch on quartz substrate and evaluation of its threshold acceleratio
  • ISSN号：0026-2692
  • 期刊名称：Microelectronics Journal
  • 时间：0
  • 页码：1112-1119
  • 语言：英文
  • 相关项目：永磁锁定的双稳态电热微驱动器预微继电器研究
作者： Zhao, Xiaolin|Yang, Zhuoqing|Cai, Haogang|Ding, Guifu|
同期刊论文项目
永磁锁定的双稳态电热微驱动器预微继电器研究
期刊论文 14 会议论文 6 专利 6
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