中文摘要：

使用射频磁控溅射法，在Si片上沉积了TiNi形状记忆合金薄膜，分别采用能谱色散光谱仪（EDS）和差示扫描热量分析（DSC）方法测试了薄膜的成分和相变特征温度，并通过给形状记忆合金（SMA）薄膜加热及冷却，观察薄膜的形变恢复情况，定性测试了SMA的形状记忆特性。在此基础上，设计并制造了一种SMA薄膜／Si膜复合膜悬臂梁结构的微驱动器。在室温下，SMA电热驱动器的悬臂梁是平直的；由于TiNi合金具有相变和形状记忆特性，当TiNi电极加上电压后，悬臂梁会产生弯曲。测试结果表明，在2．0V电压下，驱动器悬臂梁端部的驱动位移可达到70．5μm，功耗为20mW。

英文摘要：

TiNi-based shape memory alloy films were deposited on Si substrates by sputtering TiNi target. The composition of the film was tested by energy dispersive spectrograph （EDS）. The results of differential scanning calorimetry （DSC） reveal the martensitic transformation and good shape memory effect upon heating and Cooling. A type of shape memory alloy （SMA） actuator with a cantilever structure based on the TiNi/Si bimorph actuation mechanism was designed, and then was fabricated by using Si micro-machining technology. The cantilever of the actuator was flat at room temperature and bent up by applying voltage in the TiNi electrodes due to phase transformation and shape memory effect. The test ＂results show that the displacement of the tip of the cantilever reaches 70.5μm and power consumption is only 20 mW under 2.0 V driving voltage.