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Design, simulation and fabrication of a novel contact-enhanced MEMS inertial switch with a movable c
  • ISSN号：0960-1317
  • 期刊名称：Journal of Micromechanics and Microengineering
  • 时间：0
  • 页码：386-392
  • 语言：英文
  • 相关项目：永磁锁定的双稳态电热微驱动器预微继电器研究
作者： Zhou, Jiansheng|Ding, Guifu|Wang, Hong|Yang, Zhuoqing|Su, Zhijuan|Cai, Haogang|
同期刊论文项目
永磁锁定的双稳态电热微驱动器预微继电器研究
期刊论文 14 会议论文 6 专利 6
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