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A novel submicron-gap electrode fabrication technology using thermal oxidation
  • ISSN号：0928-4931
  • 期刊名称：Materials Science and Engineering: C
  • 时间：2012.3.3
  • 页码：369-374
  • 相关项目：基于一维硅纳米结构的微型电离气敏传感器研究
作者： Chen, Xuejiao|Zhang, Jian|Xu, Huhua|Hui, Shichao|Zhu, Meiguang|
同期刊论文项目
基于一维硅纳米结构的微型电离气敏传感器研究
期刊论文 20
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