中文摘要：

采用湿法化学刻蚀方法制备硅纳米线（SiNWs）,对其进行快速热退火处理,利用水浴法在SiNWs表面生长氧化锌（ZnO）纳米线,制备了ZnO/SiNWs异质结湿度传感器.采用扫描电子显微镜（SEM）和X射线衍射仪（XRD）分析了ZnO/SiNWs异质结的表面形貌和结构.测试了ZnO/SiNWs异质结湿度传感器不同湿度环境的电容响应,分析了它的工作机制.测试结果表明：传感器具有相对较大的灵敏度,较短的响应时间,较好的重复性、湿滞特性和稳定性,从而说明ZnO/SiNWs异质结在湿敏领域有很好的应用前景.

英文摘要：

The silicon nanowires（SiNWs） and ZnO were prepared by using wet chemical etching and chemical bath deposition method（CBD） respectively.ZnO/SiNWs heterojunction was fabricated as capacitive humidity sensor.The morphology and structure of the ZnO/SiNWs nanocomposites were characterized by Scanning Electron Microsopy（SEM） and X-ray diffraction.Sensing experiments were examined by measuring the capacitance response of ZnO/ SiNWs sensor which was put into different humidity environments.The results demonstrats that the humidity sensor exhibits high sensitivity and fast response time.Therefore,ZnO/SiNWs sensors are potential materials for high performance humidity sensor.