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Effects of oxygen flow ratios and annealing on TiOx deposited by reactive magnetron sputtering
  • 期刊名称：Electrochemical Society Transactions
  • 时间：0
  • 页码：195-200
  • 语言：英文
  • 相关项目：极大规模集成电路碳纳米管互连基础及关键工艺研究
作者： 王兰兰|王麒|张楷亮|
同期刊论文项目
极大规模集成电路碳纳米管互连基础及关键工艺研究
期刊论文 25 会议论文 5 专利 11
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