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Deposition of VOX films by reactive sputtering and its properties
期刊名称:Electrochemical Society Transactions
时间:0
页码:503-508
语言:英文
相关项目:极大规模集成电路碳纳米管互连基础及关键工艺研究
作者:
王芳|韦晓莹|张楷亮|
同期刊论文项目
极大规模集成电路碳纳米管互连基础及关键工艺研究
期刊论文 25
会议论文 5
专利 11
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