中文摘要：

<正> Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argonplasma using optical emission spectrometry is presented.The oxygen dissociation fraction and itsevolutions as functions of operational parameters were determined using argon as the actinometer.At a pressure of 30 Pa,the oxygen dissociation fraction decreased from 13.4% to 9.5% as the inputpower increased from 10 W to 70 W.At an input power of 50 W,the oxygen dissociation fractiondecreased from 12.3% to 7.7% when the gas pressure increased from 10 Pa to 40 Pa.The influencesof operational parameters on the generation of atomic oxygen were also discussed.

英文摘要：

Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational parameters were determined using argon as the actinometer. At a pressure of 30 Pa, the oxygen dissociation fraction decreased from 13.4% to 9.5% as the input power increased from 10 W to 70 W. At an input power of 50 W, the oxygen dissociation fraction decreased from 12.3% to 7.7% when the gas pressure increased from 10 Pa to 40 Pa. The influences of operational parameters on the generation of atomic oxygen were also discussed.