A novel symmetrical microwave power sensor based on MEMS technology
- ISSN号:1674-4926
- 期刊名称:《半导体学报:英文版》
- 时间:0
- 分类:TP212[自动化与计算机技术—控制科学与工程;自动化与计算机技术—检测技术与自动化装置] TM933.34[电气工程—电力电子与电力传动]
- 作者机构:[1]Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China~
- 相关基金:Project supported by the National Natural Science Foundation of China (No. 60676043) and the National High Technology Research and Development Program of China (No. 2007AA04Z328).
关键词:
微波功率测量, 功率传感器, MEMS技术, 对称结构, 直流电源, 测量能力, 输入功率, 温度漂移, symmetrical, MEMS, GaAs MMIC, power sensor
中文摘要:
廖小平:E-mail: xpliao@seu.edu.cn