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Property improvement of Cu-Zr alloy films with ruthenium additive for Cu metallization
  • 期刊名称：Acta Materialia
  • 时间：0
  • 页码：400-404
  • 相关项目：铜互连体系ZrxSiy超薄扩散阻挡层的性能与机理研究
作者： Ying Wang, Fei Cao, Mi-lin Zhang, Tao Zhang|
同期刊论文项目
铜互连体系ZrxSiy超薄扩散阻挡层的性能与机理研究
期刊论文 16 专利 1
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