中文摘要：

提出了一种基于磁场同步跟随的新型电磁悬浮式微驱动器，解决了悬浮驱动力与横向力相互耦合的问题，可实现高精度微运动。通过理论分析，建立了该驱动器的驱动力数学模型；采用矢量磁位法、傅里叶级数法和麦克斯韦张量法完成了该驱动器的特征参数辨识，并分析了永磁体材料、尺寸、导线阵列电流大小以及气隙高度对悬浮力大小的影响，由此得到悬浮力与气隙、电流的关系。实验结果证实了理论分析与建模的正确性以及该驱动器的实际可行性。

英文摘要：

A novel electromagnetic levitation micro-actuator based on the synchronous tracking magnetic field was proposed. High precision micro-motion was available because it solved coupling of suspension force and lateral force. The mathematical model of suspension force of this micro-actuator was analyzed and established. The methods of vector potential, Fourier series and Maxwell stress tensor were applied to distinguish characteristic parameters of this micro-actuator. The relationship between suspension and air-gap, current was achieved after the influence of magnet materiel, size, current and air-gap on the suspension force was investigated. Experimental result shows the feasibility of this micro-actuator.