中文摘要：

介绍了一种电磁悬浮微驱动器的工作原理；针对磁悬浮微驱动器的运动特点，提出了一种基于最大值原理的模糊PID微驱动控制方法，对每种控制单元的输入输出信号与控制参数作了详细分析与矫正；首先进行了仿真实验，然后构建了微驱动器的实验装置，采用阶跃、方波和阶梯等驱动信号来检验该微驱动器的跟踪能力；实验数据表明，仿真结果与实验结果基本一致，验证了所提出的微运动控制方法的正确性和可行性。

英文摘要：

An electromagnetic levitation micro-actuator was described. Aiming at the characteristics of the micro-actuator, a Fuzzy PID control method based on the maximum principl was proposed. The input and output signals and the control parameters of each control unit were analyzed and corrected. To verify the traceability of the micro-actuator, the simulation and real test experiments were performed using the step, square and ladder signals. The identity of the simulation and real test experimental results shows that the control method for the micro-actuator was correct and feasible.