中文摘要：

设计了一种基于磁场同步跟随的多自由度电磁悬浮式微驱动器，该驱动器悬浮单元和驱动单元相互独立，在一个机构中构建了集驱动、测量和控制于一体的磁悬浮微驱动新方法．通过对该驱动器的受力分析，得到了驱动器多自由度运动状态的数学方程．采用电涡流传感器和DSP控制器，建立了该微驱动器的测控系统，实验结果表明，该驱动器具有较强的稳定性与驱动能力，验证了力学分析的正确性．

英文摘要：

Based on the synchronous tracking magnetic field method, a novel electromagnetic levitation micro-actuator with multiple degrees of freedom was designed. The levitation unit and drive one of the micro-actuator are independent each other. Then an electromagnetic levitation micro-motion method was presented in one structure with integration of drive, measurement and control. After the mechanics relationships of the mcrio-actuator were analyzed, the mathematical models of movement state were derived in multiple degrees of freedom. The measurement and control system for the micro-actuator was constructed with eddy current sensors and a DSP controller. The experimental results show that the micro-actuator has the advantages of better stability and actuation ability and the mechanics analysis of the micro-actuator is reasonable.