中文摘要：

设计了一种新型的多点峰值磁场相互作用的电磁悬浮式微驱动器,解决了悬浮驱动力与横向力相互耦合的问题,有利于调节悬浮体的运动姿态。通过对悬浮力关于输入电流、气隙高度做单一因素参数化有限元分析和联合参数化有限元分析,得到了微驱动器有限元特征参数关系曲线。通过实验测试,得到的实验特征参数关系曲线与理论特征参数关系曲线和有限元特征参数关系曲线吻合一致,表明了所设计的微驱动器的可行性。

英文摘要：

A novel electromagnetic levitation micro-actuator with multiple-point-peak magnetic field interaction is proposed. In the micro-actuator, the problem of coupling of suspension force and lateral force is solved, and the movement pose can be easily adjusted by controlling the intensity ofevery peak magnetic field. The trajectory curve of the finite element analysis for the micro-actuator is obtained through single factor parametric finite element analysis and united finite element analysis of suspension force to current and air-gap. The trajectory curve obtained from experiment result is in a good agreement with those derived from finite element analysis and theoretical analysis, which verifies the feasibility of the micro-actuator.