中文摘要：

构建了一种新型磁悬浮工作平台结构，该平台结构利用永磁直线电机提供水平洛仑兹力，利用电磁铁提供垂直电磁吸力，悬浮和驱动部分相互独立，避免了两者间的耦合问题，具有出力大、运动范围广、定位精密的特点。为了研究磁场饱和、纵向边端效应和倾斜角度等冈素对磁场的影响，基于有限元数值方法建立了该平台的数学模型，并在模型的基础上对该平台的力特性进行了详细分析，获得了推力和悬浮力与气隙高度、电流和倾斜角度间的变化对应关系。分析结果表明该平台的电磁力具有较好的线性度，降低了控制的复杂度。

英文摘要：

A novel planar magnetic levitation stage was proposed. In the promising structure, the levitation and linear drive parts of the stage were separated and the coupling between them was minimized. A mover was driven by lorentz force generated from the permanent magnetic linear motors, and levitated by magnetized force by electromagnets subsystem It was made the stage had advantages of greater force output, wider motion area and precise positioning. In order to obtain the influences of saturation, skew angle and longitudinal end effect on airgap magnetic field, FEM was applied to construct the mathematic model of stage. On base of them, the relationships between thrust, normal force and current magnitude, air gap length and skew angle were studied. The analysis results show the forces of the stage have good linearity, so the control strategy can be simplified.