中文摘要：

采用水热腐蚀技术制备了表面同时具有规则阵列结构和多孔结构的硅微米／纳米结构复合体系硅纳米孔柱阵列（Si-NPA），并测试了其电阻酒敏特性。结果表明：Si-NPA对酒精具有较高的灵敏度和较快的响应时间。Si-NPA良好的酒精敏感性能被归因于Si-NPA的表面结构，即高灵敏度来自于其巨大的比表面积对酒精分子的物理吸附，而快响应时间则来源于其表面规则的硅柱阵列为气体的传输提供有效的通道。Si-NPA独特的层次结构使其有可能在未来硅基薄膜传感器等方面得到应用。

英文摘要：

Silicon nanoporous pillar array （Si-NPA）, a novel silicon micron/nanometer structural composite system with both regular surface pillar array and porous structure, is prepared by hydrothermal etching method and its ethanol-sensing properties are measured. Results show that Si-NPA exhibited high sensitivity and short response time to ethanol. This excellent performance of Si-NPA to ethanol is due to its surface structure, the high sensitivity originated from the physical adsorption brought by the large specific area,while the short response time come from the effective gas transportation pathway provided by the regular pillar array. The unique hierarchical structure of Si-NPA might be applied in the field of silicon-based thin film sensors in future.