中文摘要：

在国产SA-6T型离子镀膜机上利用反应直流溅射方法，在抛光后的W18Cr4V高速钢基体表面制备TiN膜层，考察氮气流量对薄膜色泽的影响。用扫描电镜对薄膜表面形貌进行观测，发现沉积的TiN膜层质量良好，无孔洞，表面平整、致密。采用色度计定量测试了TiN薄膜的色泽，并分析了氮气流量对色泽的影响。结果表明，氮气流量即沉积气压对装饰镀TiN薄膜的颜色有重要影响，通过调节氮气流量，可有效改变TiN膜层的色泽。TiN薄膜的颜色随氮气流量增大而加深。

英文摘要：

TiN films were deposited on well-polished W18Cr4V steel using DC magnetron sputtering and effects of nitrogen flow on chromaticity of the TiN films were investigated. SEM was employed to observe the morphology of the films. Results showed that the TiN films fabricated by magnetron sputtering possessed clean and dense surfaces. Chromaticityimeter was used to measure the chromaticity of the films quantitatively, and effects of nitrogen flow on the chromaticity of the films were researched. Results revealed that desired chromaticity could be achieved by adjusting the nitrogen flow and chromaticity of the TiN films became deeper with the increasing of N2 flow.