中文摘要：

利用电弧离子镀技术在高速钢基体上于不同氮气流量条件下制备CrN薄膜样品，通过纳米压痕仪、XP-2台阶仪、SEM和XRD测试分析了薄膜的硬度、弹性模量、厚度、表面形貌和物相结构。实验结果表明，氮气流量对CrN薄膜的组织结构和力学性能都具有较为明显的影响。

英文摘要：

CrN thin films were deposited onto high-speed steel using arc ion plating with different N2 flows. Hardness and elastic modulus were measured by a nanoindentor. The XP-2 profiler was employed to measure thickness of the films. Morphology and microstructure of the films were investigated by SEM and XRD, respectively. The resuhs show that N2 flow plays an important role in the microstrueture and properties of CrN films.