中文摘要：

随着半导体晶圆生产加工变得越来越复杂，多组合设备也越来越频繁的被采用．多组合设备的调度关键在于怎么协调好相邻机械手的操作．针对拥有2-空间缓冲模块的单臂多组合设备，同时它的瓶颈设备被假设为处于加工一边界，首先运用面向资源的PetriNet对系统进行建模，然后在分析系统调度特性的基础上提出了此多组合设备的周期时间一定可以达到下界，并给出了有效的调度算法．最后，用实例证明了该调度方法的可操作性．

英文摘要：

As the semiconductor manufacturing processes become more and more complex, multi-cluster tools are adopted to accommodate the industrial needs. The main complexity of scheduling a multi-cluster tool is to coordinate the neighboring robots. To schedule a single-arm multi-cluster tool with two-space buffering modules and process-bound bottleneck individual tool, first, a resource-oriented Petri Net is used to model the system. Then, by analyzing the dynamic behavior of the system, this work shows that such a tool can always reach the lower bound of cycle time, and meanwhile, an effective algorithm is given to do so. Finally, illustrative examples are given to show the application and power of the proposed method.