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COLORED TIMED PETRI NETS FOR MODELING AND ANALYSIS OF CLUSER TOOLS
ISSN号:1561-8625
期刊名称:Asian Journal of Control
时间:0
页码:253-266
相关项目:半导体芯片制造中组合设备的实时调度和运行控制优化
作者:
Wu, NaiQi|Zhou, MengChu|
同期刊论文项目
半导体芯片制造中组合设备的实时调度和运行控制优化
期刊论文 18
会议论文 4
同项目期刊论文
Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity
半导体晶圆制造中组合设备运行和控制综述
Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded A
Analysis of Wafer Sojourn Time in Dual-Arm Cluster Tools With Residency Time Constraint and Activity
Petri net modeling and deadlock analysis of multicluster tools in semiconductor manufacturing
Petri Net-Based Scheduling of Single-Arm Cluster Tools With Reentrant Atomic Layer Deposition Proces
PROCESS VS RESOURCE-ORIENTED PETRI NET MODELING OF AUTOMATED MANUFACTURING SYSTEMS
具有并行加工模块的组合设备故障响应策略
多组合设备的调度控制研究综述
具有晶圆重入过程的单臂组合设备调度中的节拍分析
Petri net modeling and wafer sojourn time analysis of single-arm cluster tools with residency time c
EM-Plant-based parameterization virtual cluster tool
Schedulability Analysis and Optimal Scheduling of Dual-Arm Cluster Tools With Residency Time Constra
半导体制造中多组合设备的Petri网建模及死锁分析
具有2-空间缓冲模块的多组合设备的优化调度
Cycle Time Analysis for Wafer Revisiting Process in Scheduling of Single-arm Cluster Tools
半导体制造中具有重入加工工艺的双臂组合设备的调度研究