中文摘要：

在半导体芯片制造中越来越广泛使用多组合设备．本文介绍了多组合设备的结构配置、生产运行过程、调度控制问题的一般特征条件、应该满足的约束及周期性调度策略；分析了问题的复杂性因素．从多组合设备的结构特征、运行过程特征两方面分类综述了调度问题的建模、分析方法、调度算法及存在的问题，最后指出了未来的研究方向．

英文摘要：

Multicluster tools are increasingly adopted in semiconductor manufacturing. This survey introduces the configurations of multicluster tools, operation processes, constraints, and cyclic scheduling policy. The complexity of the multicluster tool scheduling is analyzed. Then, the state-of-the-art for modeling, analysis and algorithms are reviewed in terms of different configurations and fabrication processes; and the open problems are pointed out. Finally, future research directions are indicated.