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PROCESS VS RESOURCE-ORIENTED PETRI NET MODELING OF AUTOMATED MANUFACTURING SYSTEMS
ISSN号:1561-8625
期刊名称:Asian Journal of Control
时间:0
页码:267-280
相关项目:半导体芯片制造中组合设备的实时调度和运行控制优化
作者:
Wu, NaiQi|Zhou, MengChu|
同期刊论文项目
半导体芯片制造中组合设备的实时调度和运行控制优化
期刊论文 18
会议论文 4
同项目期刊论文
Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity
半导体晶圆制造中组合设备运行和控制综述
Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded A
Analysis of Wafer Sojourn Time in Dual-Arm Cluster Tools With Residency Time Constraint and Activity
Petri net modeling and deadlock analysis of multicluster tools in semiconductor manufacturing
Petri Net-Based Scheduling of Single-Arm Cluster Tools With Reentrant Atomic Layer Deposition Proces
具有并行加工模块的组合设备故障响应策略
多组合设备的调度控制研究综述
COLORED TIMED PETRI NETS FOR MODELING AND ANALYSIS OF CLUSER TOOLS
具有晶圆重入过程的单臂组合设备调度中的节拍分析
Petri net modeling and wafer sojourn time analysis of single-arm cluster tools with residency time c
EM-Plant-based parameterization virtual cluster tool
Schedulability Analysis and Optimal Scheduling of Dual-Arm Cluster Tools With Residency Time Constra
半导体制造中多组合设备的Petri网建模及死锁分析
具有2-空间缓冲模块的多组合设备的优化调度
Cycle Time Analysis for Wafer Revisiting Process in Scheduling of Single-arm Cluster Tools
半导体制造中具有重入加工工艺的双臂组合设备的调度研究