中文摘要：

为了有效响应组合设备加工模块常出现的故障,通过分析单臂组合设备的并行模块及其加工流程模式,以及严格的逗留时间约束的晶圆加工过程,建立了Petri网模型,该模型能够描述系统的暂态特性和稳态特性。基于该模型,当并行模块中一个模块出现故障时,分析系统的可调度性,对可调度情况能够提出有效的运行控制策略,使得系统的晶圆不违反逗留时间约束。最后通过实例验证了该控制策略的可行性。

英文摘要：

Processing modules in cluster tools were prone to failure and thus it was important to have effective failure response policy.By analyzing single-arm cluster tools with parallel processing module flow pattern and strict wafer residency time constraints,a Petri net model was constructed.This model could not only express the steady state behavior of the system but also the transient behavior.Based on it,schedulability was analyzed whenever any one of the parallel modules for an operation failed.If it was schedulable,effective control policies were presented to keep the system in operation so that no wafer residency time constraint was violated.Examples were presented to show the feasibility of the proposed control policies.