中文摘要：

簇工具执行的一些晶片制造过程要求重游。与晶片重游，一个簇工具是很困难的为重游的进程由于很多可能的时间表被安排。原子层免职(ALD ) 是有晶片重游的一个典型过程那应该被簇工具执行。这份报纸为 ALD 过程讨论单个手臂的簇工具的安排问题。在安排如此的一个系统，最困难的部分是安排重游的进程以便周期时间被最小化。因此，这份报纸与重游时间 k = 学习 ALD 的重游的过程 3， 4，和 5，并且分析表情被获得为可能的 k 计算周期时间时间表。然后，有最小的周期时间的时间表是最佳的。这样，如此的一个重游的过程的安排问题变得很简单，这是在与晶片重游安排簇工具的重要改进。解说性的例子被举显示出建议方法的申请。

英文摘要：

Some wafer fabrication processes performed by cluster tools require revisiting. With wafer revisiting, a cluster tool is very difficult to be scheduled due to a large number of possible schedules for the revisiting process. Atomic layer deposition （ALD） is a typical process with wafer revisiting that should be performed by cluster tools. This paper discusses the scheduling problem of single-arm cluster tools for the ALD process. In scheduling such a system, the most difficult part is to schedule the revisiting process such that the cycle time is minimized. Thus, this paper studies the revisiting process of ALD with revisiting times k = 3, 4, and 5, and analytical expressions are obtained to calculate the cycle time for the k possible schedules. Then, the schedule with the minimal cycle time is the optimal one. In this way, the scheduling problem of such a revisiting process becomes very simple and this is a significant improvement in scheduling cluster tools with wafer revisiting. Illustrative example is presented to show the application of the proposed method.