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中文摘要：
运用微机电系统（MEMS）工艺制备了不同耦合间距的微环谐振腔,针对耦合间距对耦合系数、谐振深度的影响,进行了理论分析与仿真,并对结构进行耦合实验测试。测试结果表明,随着微环耦合间距的增加,耦合系数减小,谐振深度变浅,这与理论仿真一致。实际计算了相应的耦合效率、3dB带宽及品质因数,随着耦合间距增大,耦合效率降低,3dB带宽也随之变窄,微环谐振腔的品质因数逐渐提高。研究结果为微环谐振腔的进一步优化设计及其在相关领域中的研究与应用提供了依据。
英文摘要：
Microring resonators with different coupling gaps are fabricated by micro-electro-mechanical-systems （MEMS） technology. To acquire the relationships of coupling gap with coupling coefficient and resonance depth, the theoretical analysis, simulation and coupling experiment are carried out. The test results show that, with the increase of the coupling gap, coupling coefficient decreases and coupling depth becomes shallower, which are consistent with simulation. Actual calculation of the coupling efficiency, 3 dB bandwidth and quality factor show that, as the gap increasing, the coupling efficiency becomes lower, 3 dB bandwidth turns narrower and the quality factor increases. The results provide a foundation for further design and optimization of microring resonator and its research and application in related fields.
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