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中文摘要：
针对谐振式微腔的应用需求,提出了一种新型三环谐振式微腔结构,类似于原子系统中的电磁诱导透明,耦合诱导透明（CRIT）效应在一个新的光学微腔系统中已被实验证明.该结构在硅基上由三个尺寸完全一样的微环腔组成,通过理论分析、制备和实验测试,能够观察到CRIT现象,其频谱具有低群速的狭窄透明峰,与光栅耦合器的耦合效率为34%,并且谐振器的品质因数达到了0.65×105,同时,失谐的谐振波长可以通过温度变化来控制,这在旋转传感、光滤波器、光存储器等方面的应用有重要意义.
英文摘要：
For the application requirements of resonant micro-cavity, an original three-ring resonant micro-cavity structure is proposed in this paper. Like electromagnetically induced transparency in an atomic system, the coupled resonator- induced transparency （CRIT） phenomenon in a new optical micro-cavity system is proven experimentally. Up to now, most of the resonators based on CRIT are just in the theoretical exploration stage, and the analysis of the double-ring structure has been relatively common. The CRIT effect of a resonator has a significant relationship with the coupler insertion loss, the ring circumference, and the multiples of the rings, which need high requirements in the structural design and preparation process. In order to reduce the difficulty in design and preparation, we propose a new three-ring cascade resonator structure with the same cavity size on silicon. According to the transfer matrix method and coupled mode theory, we find a CRIT effect after theoretical analysis. Our devices are fabricated on an SOI wafer. By using the micro-cavity measurement platform to repeat and analyze the tests of single ring and three-ring cascade resonator structure, we obtain a grating coupler efficiency of 30%. By applying the antireflection coating, the coupling efficiency of the grating coupler is up to 34%. During the test, the mutual interference between annular cavities of the three-ring resonators produces two transmission peaks, the output spectrum of the resonator with a narrow transparency peak at a low group velocity~ which is verified in CRIT phenomenon. Compared with the traditional single-ring structure, the resonator has a quality factor increasing four times, reaching a value of up to 0.65 ~ 105, the through and drop transmission spectra of the resonator are reconciled well with each other. At the same time, in order to obtain the sensitivity of the resonator to temperature, we conduct tuning tests of the resonator temperature characteristics, the resonant peak is moved to the large wavelengt
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