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中文摘要：
硅基盘型谐振腔由于其高品质因数Q值的特性,作为谐振式陀螺的核心元件,有望实现谐振式陀螺的小型化、集成化,成为目前谐振式陀螺中研究的基础。谐振式陀螺的极限灵敏度受谐振腔的DQ乘积（谐振腔直径D与Q值的乘积）的大小直接影响,提出制作大尺寸的盘型谐振腔获得高的DQ乘积,从而提升谐振式陀螺的极限灵敏度。通过理论计算仿真得到盘型谐振腔的Q值、DQ乘积以及陀螺灵敏度与谐振腔直径D的对应关系及其原因,实验中,采用传统半导体工艺制备不同直径的盘型腔（400μm~10 mm）,通过与锥形光纤进行耦合测试得到输出透射谱线,得到盘型谐振腔直径D与Q值的变化成正比关系,得到最优的盘型腔参数,当D=10 mm时,Q值可达1.2×106,通过提升工艺精度以及后续优化还有极大的提升空间,理想条件下将实验得到的数据通过理论计算得到谐振式陀螺灵敏度可达0.02°/s,提供了一种提高谐振式陀螺灵敏度的思路。
英文摘要：
Optical resonator with high quality factor Q values can be used as the core component of the resonator optic gyros, the miniaturization and integration of which can be achieved. These advantages develope the basis of current research in resonator gyroscope. In order to realize the integrated optical gyro with high sensitivity, on the basis of the production target of high Q value, large diameter cavity of integrated optical cavity fieldwiththedisc cavity core sensitive element is proposed for the application of resonant optical gyro. The correspondence between the Q value of disc cavity, DQ product（product of the diameter ofresonant cavity D and Q value）, the sensitivity of optical resonator and the diameter of disc cavity can be analyzed by the theoretical calculation. In the experiment the disc cavity areprepared by the semiconductor process. Control the mask to achieve various diamond from400 μm to 10 mm. The output transmission of disc cavity is collected through tapered fiber coupling, the result is that the Q factor is proportional to the change of the diameter of the disc cavity. When D=10 mm, the quality factor of the disc cavity is Q=1.2× 106, which can achieve the optimal gyro sensitivity of about 0.02°/s, and meet the requirements of business level application, which lays the foundation for research on a novel resonant optical chip level, integration of the micro resonator gyroscope.
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