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中文摘要：
为研究双环谐振腔结构力敏传感特性,设计了不同半径比的基于绝缘衬底上硅的双环微腔结构。通过理论分析以及实验测试并结合有限元仿真得出：半径比为3∶1的双环结构的灵敏度为80.26 pm/MPa;而半径比为1∶1的双环结构的灵敏度高达128.87 pm/MPa,具有高的检测灵敏度,表明双环微腔敏感结构单元可应用于应力检测领域。
英文摘要：
To study stress sensing properties of double micro-ring resonator,the double ring resonators with different radius ratio based on silicon-on-insulator are designed and fabricated. From the theoretical analysis,experimental test and finite element simulation,it can be concluded that the sensitivity of 80. 26 pm / MPa has been achieved in the ring resonator structure whose radius ratio is 3 ∶ 1,and the sensitivity of 128. 87 pm / MPa has been obtained in the ring resonator structure whose radius ratio is 1 ∶ 1. The results indicate that the double ring resonators has a skyscraping characteristic of stress sensitivity so it can be applied in stress measurement fields.
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