中文摘要：

介绍了电容式传感器在小量程压力测量领域的优势和目前研制小量程MEMS电容式压力传感器的技术难点。从实现MEMS电容式传感器小量程压力测量的不同方法出发,详细论述了国内外的研究成果、关键技术及应用情况。最后分析总结了小量程MEMS电容式压力传感器的发展方向与挑战。

英文摘要：

Advantages in low pressure measurement of capacitive sensors and technical difficulties in the realization of low pressure MEMS capacitive sensor are presented. From the perspective of different measuring methods, the developments of low pressure MEMS capacitive sensor in worldwide are overviewed from research achievements, key technologies and applications in detail. Finally, the development direction and present challenges of these sensors are analyzed.