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中文摘要：
平面波导芯片与阵列光纤之间的对准,主要依靠器件封装设备运动平台的六维全空间亚微米精度运动控制,来实现其精确定位对准,基于多体系统理论,阐述四轴运动平台综合空间误差的建模过程,为阵列光波导器件封装设备运动平台的精度分析和误差补偿,提供一种理想的建模技术。
英文摘要：
The alignment between planar wavegnide and the fiber-optic devices relies on the 6-dimensional space of the main campaign platform of packaging equipment for the entire sub-micron precision motion control to achieve their exact location. Based on the multi-body system theory, the universal volumetric error of a four-campaign platform model process is described in detail and an ideal modeling technique of the accuracy of analysis and error compensation for optical wavegnide packaging equipment campaign platform is also provided.
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