中文摘要：

阵列波导器件的封装是利用超精密的运动平台,将波导芯片与阵列光纤进行对准耦合并固定,实现光波导器件的高性能和高可靠性.通过分析6自由度相邻正交运动轴的超精密运动平台的坐标变换,建立运动轴与末端阵列光纤的位姿运动方程.运动方程表明在假设相邻运动轴正交的条件下,末端阵列光纤的姿态只与旋转轴相关,与平移轴无关,且在旋转±10°范围内反解是确定的.

英文摘要：

Ultra-precision stage is generally applied for alignment and attachment processes of planner waveguide device,in which aligning planner waveguide chip and fiber array is made firstly,then attaching them tightly is followed,so the optical waveguide device is probably fabricated with high quality and reliability.A kind of ultra-precision stage that consists of adjacent orthogonal shafts is designed.After coordinate transformation is analyzed,kinetic equation that states clearly the relationship between position and attitude of fiber array assembled in the last unit of motion is got.The equation indicates that the attitude of fiber array is only associated with rotational variant of motion,yet without translation of axis,and that back solution exists in the limit of ±10° of rotating.