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中文摘要：
以三光束平面镜微型激光干涉仪作为高精度的标准量,研究新型纳米三坐标测量机的误差检定方法,设计相应的激光头姿态调节架和目标靶镜,组建一套适用于其的误差检定系统,分四次即可实现对测量精度影响较大的11项单项误差进行相对高精度、便捷、同步地检定。以LabVIEW作为软件开发平台,基于三次样条插值算法,编写对单项误差的采样数据进行插值计算的应用程序,以求得单项误差在量程范围内任意位置的值。
英文摘要：
Based on the triple-beam plane-mirror interferometer,this paper describes the error detection system for nanometer coordinate measuring machines（Nano-CMM）,which also includes the attitude regulation bracket of laser head and a set of target retroreflectors.It detects 11 items geometrical error of Nano-CMM using the error detection methods that have been represented,which are considered to have more influence on measurement accuracy.The graphical program software LabVIEW8 is used as the software development platform.Based on the cubic spline interpolation algorithm,it designs the interpolation calculation program to get arbitrary value of measuring range for one single geometrical error.
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