介绍了电磁激励硅谐振梁的激励和检测原理,给出了双端固支的硅谐振梁谐振频率公式,并利用该公式分析了双端固支梁的谐振频率和梁尺寸的关系.本文利用有限元软件模态分析计算了三种不同的谐振频率情况,并逐一加以比较分析.本文还利用有限元软件对受力弯曲的工字梁做了静态分析,从而得出了在一定磁场力作用下的应力分布图,从而对压敏电阻的设计提供了一定的依据.
The actuation and detection principle of a magnetically actuated silicon resonant beam is introduced. The resonant frequency of a clamped-clamped silicon resonant beam is presented. The relation between resonant frequency of the clamped-clamped beam and the beam's dimension. Three resonant frequencies using the Finite Element analysis are calculated, and compared with each other. A stress map of H bearing beam is obtained using the Finite Element analysis, which is valuable to the design of a piezoresistor.