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Experimental Investigation of Lubricant Flow Properties Under Micro Oil Supply Condition
  • ISSN号：0742-4787
  • 期刊名称：JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME
  • 时间：0
  • 页码：041501-041507
  • 相关项目：极大规模集成电路铜互连平坦化新原理及其应用研究
作者： Qian Shanhua|Guo Dan|Liu Shuhai|Lu Xinchun|
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极大规模集成电路铜互连平坦化新原理及其应用研究
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