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Effect of kinematic parameters and their coupling relationships on global uniformity of chemical-mec
  • ISSN号：0894-6507
  • 期刊名称：Ieee Transactions On Semiconductor Manufacturing
  • 时间：0
  • 页码：502-510
  • 相关项目：极大规模集成电路铜互连平坦化新原理及其应用研究
作者： Zhao Dewen|He Yongyong|Wang Tongqing|Lu Xinchun|
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极大规模集成电路铜互连平坦化新原理及其应用研究
期刊论文 24 专利 72
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